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TX210 (Telescopic single arm)

TX210 (Telescopic single arm)

HIGHLY RIGID TELESCOPIC ARM

All of the features of the NX series have been carried over to the TX series, including the ability to access two or three FOUPs, depending on their configuration. The TX series design utilizes the NX series horizontal articulated arm with a highly rigid telescopic base, delivering high-speed handling in high and low positions.

EXCEPTIONAL REACH
Single TX series arm can reach two or three FOUPs. The arm is designed to be highly rigid and to access wafer stages with a narrow pitch as well as FOUPs in arbitrary positions, including high and low positions.

HIGH ACCURACY
The TX series robot is designed to offer exceptional accuracy with large vertical reach for equipment mounted in high and low positions.

SEMI F47 COMPLIANT
TX models instantaneously respond to electrical fluctuations, such as a drop in voltage, and automatically resume operation when voltage is restored.

SEMI S2 COMPLIANT
TX models meet specific considerations for environment and personal safety.

COLLISION DETECTION
Software and hardware equipped with collision detection features to lessen the damage of delicate and specialized equipment caused by collisions.

Features:
  • Structure: Telescopic horizontal articulated type
  • Degrees of Freedom: 4 axes
  • Maximum Reach: 766 mm
  • Repeatability: 0.1 mm (wafer center)
  • Cleanliness*1: ISO Class 1
  • Controller: D60/D61

*1: Measured in Kawasaki's clean booth

Please call us on 317-214-7266 for pricing options.

Click here to download the product brochure (PDF file).